| 1. Identity statement | ||||
| Reference Type | Journal Article | |||
| Site | mtc-m21b.sid.inpe.br | |||
| Holder Code | isadg {BR SPINPE} ibi 8JMKD3MGPCW/3DT298S | |||
| Identifier | 8JMKD3MGP3W34P/3L9LS3P | |||
| Repository | sid.inpe.br/mtc-m21b/2016/03.03.17.59 | |||
| Last Update | 2016:03.03.18.00.37 (UTC) administrator | |||
| Metadata Repository | sid.inpe.br/mtc-m21b/2016/03.03.17.59.26 | |||
| Metadata Last Update | 2018:06.04.02.40.37 (UTC) administrator | |||
| DOI | 10.1063/1.4939013 | |||
| ISSN | 0034-6748 | |||
| Citation Key | UedaSPMORLP:2016:NeMePl | |||
| Title | New method of plasma immersion ion implantation and also deposition of industrial components using tubular fixture and plasma generated inside the tube by high voltage pulses  | |||
| Year | 2016 | |||
| Month | Jan. | |||
| Access Date | 2024, May 19 | |||
| Type of Work | journal article | |||
| Secondary Type | PRE PI | |||
| Number of Files | 1 | |||
| Size | 5161 KiB | |||
| 2. Context | ||||
| Author | 1 Ueda, Mário 2 Silva Junior, Ataide Ribeiro da 3 Pillaca, Elver Juan de Dios Mitma 4 Mariano, Samantha de Fátima Magalhães 5 Oliveira, Rogério de Moraes 6 Rossi, José Osvaldo 7 Lepienski, Carlos Maurício 8 Pichon, Luc | |||
| Resume Identifier | 1 8JMKD3MGP5W/3C9JHSB 2 3 4 5 8JMKD3MGP5W/3C9JJ6L 6 8JMKD3MGP5W/3C9JHJ5 | |||
| Group | 1 LAP-CTE-INPE-MCTI-GOV-BR 2 CMS-ETES-SPG-INPE-MCTI-GOV-BR 3 CMS-ETES-SPG-INPE-MCTI-GOV-BR 4 CMS-ETES-SPG-INPE-MCTI-GOV-BR 5 LAP-CTE-INPE-MCTI-GOV-BR 6 LAP-CTE-INPE-MCTI-GOV-BR | |||
| Affiliation | 1 Instituto Nacional de Pesquisas Espaciais (INPE) 2 Instituto Nacional de Pesquisas Espaciais (INPE) 3 Instituto Nacional de Pesquisas Espaciais (INPE) 4 Instituto Nacional de Pesquisas Espaciais (INPE) 5 Instituto Nacional de Pesquisas Espaciais (INPE) 6 Instituto Nacional de Pesquisas Espaciais (INPE) 7 Universidade Federal do Paraná (UFPR) 8 Institut Pprime | |||
| Author e-Mail Address | 1 ueda@plasma.inpe.br 2 ataide@plasma.inpe.br 3 elver.mitma@inpe.br 4 samantha.magalhães@plasma.inpe.br 5 rogerio.oliveira@inpe.br 6 jose.rossi@inpe.br | |||
| Journal | Review of Scientific Instruments | |||
| Volume | 87 | |||
| Number | 1 | |||
| Pages | 013902 | |||
| Secondary Mark | A1_ENGENHARIAS_IV A2_INTERDISCIPLINAR A2_ENGENHARIAS_III B1_ENGENHARIAS_II B1_ASTRONOMIA_/_FÍSICA B2_ODONTOLOGIA B2_MEDICINA_I B3_QUÍMICA B3_MATERIAIS B3_ENSINO B3_CIÊNCIAS_BIOLÓGICAS_I | |||
| History (UTC) | 2016-03-03 17:59:26 :: simone -> administrator :: 2018-06-04 02:40:37 :: administrator -> simone :: 2016 | |||
| 3. Content and structure | ||||
| Is the master or a copy? | is the master | |||
| Content Stage | completed | |||
| Transferable | 1 | |||
| Content Type | External Contribution | |||
| Version Type | publisher | |||
| Abstract | A new method of Plasma Immersion Ion Implantation (PIII) and deposition (PIII and D) for treating industrial components in the batch mode has been developed. A metal tubular fixture is used to allocate the components inside, around, and along the tube, exposing only the parts of each component that are to be ion implanted to the plasma. Hollow cathode-like plasma is generated only inside the tube filled with the desired gas, by applying high negative voltage pulses to the hollow cylindrical fixture which is insulated from the vacuum chamber walls. This is a very convenient method of batch processing of industrial parts by ion implantation, in which a large number of small to medium sized components can be treated by PIII and PIII and D, very quickly, efficiently, and also at low cost. | |||
| Area | FISPLASMA | |||
| Arrangement 1 | urlib.net > BDMCI > Fonds > Produção anterior à 2021 > LABAP > New method of... | |||
| Arrangement 2 | urlib.net > BDMCI > Fonds > Produção pgr ATUAIS > CMS > New method of... | |||
| doc Directory Content | access | |||
| source Directory Content | there are no files | |||
| agreement Directory Content |
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| 4. Conditions of access and use | ||||
| data URL | http://urlib.net/ibi/8JMKD3MGP3W34P/3L9LS3P | |||
| zipped data URL | http://urlib.net/zip/8JMKD3MGP3W34P/3L9LS3P | |||
| Language | en | |||
| Target File | ueda.pdf | |||
| User Group | simone | |||
| Reader Group | administrator simone | |||
| Visibility | shown | |||
| Archiving Policy | allowpublisher allowfinaldraft | |||
| Update Permission | not transferred | |||
| 5. Allied materials | ||||
| Mirror Repository | urlib.net/www/2011/03.29.20.55 | |||
| Next Higher Units | 8JMKD3MGPCW/3ET2RFS 8JMKD3MGPCW/3F358GL | |||
| Citing Item List | sid.inpe.br/mtc-m21/2012/07.13.14.52.24 2 sid.inpe.br/mtc-m21/2012/07.13.14.59.24 2 sid.inpe.br/bibdigital/2013/09.25.21.49 1 | |||
| Dissemination | WEBSCI; PORTALCAPES; MGA; COMPENDEX; SCOPUS. | |||
| Host Collection | sid.inpe.br/mtc-m21b/2013/09.26.14.25.20 | |||
| 6. Notes | ||||
| Empty Fields | alternatejournal archivist callnumber copyholder copyright creatorhistory descriptionlevel e-mailaddress format isbn keywords label lineage mark nextedition notes orcid parameterlist parentrepositories previousedition previouslowerunit progress project readpermission rightsholder schedulinginformation secondarydate secondarykey session shorttitle sponsor subject tertiarymark tertiarytype url | |||
| 7. Description control | ||||
| e-Mail (login) | simone | |||
| update | ||||